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Journal of Zhejiang University SCIENCE A 2004 Vol.5 No.4 P.422~427

http://doi.org/10.1631/jzus.2004.0422


A novel fabrication of meso-porous silica film by sol-gol of TEOS


Author(s):  Yin Ming-zhi, Yao Xi, ZHang Liang-ying

Affiliation(s):  Electronic Materials Research Laboratory, Xi'an Jiaotong University, Xi'an 710049, China

Corresponding email(s):   ymingzhi@nwpu.edu.cn

Key Words:  Tetraethyl orthosilicate (TEOS), Sol-gel technique, Porous silica film, Thermal conductivity


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Yin Ming-zhi, Yao Xi, ZHang Liang-ying. A novel fabrication of meso-porous silica film by sol-gol of TEOS[J]. Journal of Zhejiang University Science A, 2004, 5(4): 422~427.

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%A ZHang Liang-ying
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DOI - 10.1631/jzus.2004.0422


Abstract: 
A homogeneous crack-free nano- or meso-porous silica films on silicon was fabricated by colloidal silica sol derived by hydrolyzing tetraethyl orthosilicate (TEOS) catalyzing with (C4H9)4N+OH- in water medium. the solution with ratio of H2O/TEOS≥15, R4N+ and glycerol as templates, combining with the hydrolyzed intermediate, controlled the silica aggregating; the templated silica film with heterostructure was developed into homogeneous nano-porous then meso-porous silica films after being annealed from 750 °C to 850 °C; the formation mechanism of the porous silica films was discussed; morphologies of the silica films were characterized. the refractive indexes of the porous silica films were 1.256-1.458, the thermal conductivity < 0.7 W/m/K. The fabricating procedure and the sequence had not been reported before.

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