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Received: 2009-11-25

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Journal of Zhejiang University SCIENCE A 2009 Vol.10 No.11 P.1601~1608


A novel restricted-flow etching method for glass

Author(s):  Hai-bo XIE, Yi ZHENG, Yu-run FAN, Xin FU, Hua-yong YANG

Affiliation(s):  State Key Laboratory of Fluid Power Transmission and Control, Zhejiang University, Hangzhou 310027, China

Corresponding email(s):   yizheng@zju.edu.cn

Key Words:  Microfluidics, Micro fabrication, Etching, Laminar flow

Hai-bo XIE, Yi ZHENG, Yu-run FAN, Xin FU, Hua-yong YANG. A novel restricted-flow etching method for glass[J]. Journal of Zhejiang University Science A, 2009, 10(11): 1601~1608.

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author="Hai-bo XIE, Yi ZHENG, Yu-run FAN, Xin FU, Hua-yong YANG",
journal="Journal of Zhejiang University Science A",
publisher="Zhejiang University Press & Springer",

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%T A novel restricted-flow etching method for glass
%A Hai-bo XIE
%A Yu-run FAN
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%A Hua-yong YANG
%J Journal of Zhejiang University SCIENCE A
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%N 11
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%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.A0820818

T1 - A novel restricted-flow etching method for glass
A1 - Hai-bo XIE
A1 - Yu-run FAN
A1 - Xin FU
A1 - Hua-yong YANG
J0 - Journal of Zhejiang University Science A
VL - 10
IS - 11
SP - 1601
EP - 1608
%@ 1673-565X
Y1 - 2009
PB - Zhejiang University Press & Springer
ER -
DOI - 10.1631/jzus.A0820818

This paper presents a novel micro fabrication method based on the laminar characteristics of micro-scale flows. Therein the separator and etchant are alternatively arranged in micro channels to form multiple laminar streams, and the etchant is located at the site where the reaction is supposed to occur. This new micro fabrication process can be used for the high aspect ratio etching inside a microchannel on glass substrates. Furthermore, the topography of microstructure patterned by this method can be controlled by changing the flow parameters of the separator and etchant. Experiments on the effects of flow parameters on the aspect ratio, side wall profile and etching rate were carried out on a glass substrate. The effect of flow rates on the etching rate and the micro topography was analyzed. In addition, experiments with dynamical changes of the flow rate ratio of the separator and etchant showed that the verticality of the side walls of microstructures can be significantly improved. The restricted flowing etching technique not only abates the isotropic effect in the traditional wet etching but also significantly reduces the dependence on expensive photolithographic equipment.

Darkslateblue:Affiliate; Royal Blue:Author; Turquoise:Article


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