Full Text:   <2787>

Summary:  <1767>

CLC number: TB51

On-line Access: 2024-08-27

Received: 2023-10-17

Revision Accepted: 2024-05-08

Crosschecked: 2018-09-12

Cited: 0

Clicked: 4293

Citations:  Bibtex RefMan EndNote GB/T7714

 ORCID:

Jia-shi Yang

https://orcid.org/0000-0003-3971-1240

-   Go to

Article info.
Open peer comments

Journal of Zhejiang University SCIENCE A 2018 Vol.19 No.10 P.786-795

http://doi.org/10.1631/jzus.A1700396


Thin film bulk acoustic wave filters with ring-dot electrodes


Author(s):  Jing Liu, Jian-ke Du, Ji Wang, Jia-shi Yang

Affiliation(s):  Piezoelectric Device Laboratory, School of Mechanical Engineering and Mechanics, Ningbo University, Ningbo 315211, China; more

Corresponding email(s):   dujianke@nbu.edu.cn, jyang1@unl.edu

Key Words:  Piezoelectric, Thin film, Vibration, Resonator, Filter


Jing Liu, Jian-ke Du, Ji Wang, Jia-shi Yang. Thin film bulk acoustic wave filters with ring-dot electrodes[J]. Journal of Zhejiang University Science A, 2018, 19(10): 786-795.

@article{title="Thin film bulk acoustic wave filters with ring-dot electrodes",
author="Jing Liu, Jian-ke Du, Ji Wang, Jia-shi Yang",
journal="Journal of Zhejiang University Science A",
volume="19",
number="10",
pages="786-795",
year="2018",
publisher="Zhejiang University Press & Springer",
doi="10.1631/jzus.A1700396"
}

%0 Journal Article
%T Thin film bulk acoustic wave filters with ring-dot electrodes
%A Jing Liu
%A Jian-ke Du
%A Ji Wang
%A Jia-shi Yang
%J Journal of Zhejiang University SCIENCE A
%V 19
%N 10
%P 786-795
%@ 1673-565X
%D 2018
%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.A1700396

TY - JOUR
T1 - Thin film bulk acoustic wave filters with ring-dot electrodes
A1 - Jing Liu
A1 - Jian-ke Du
A1 - Ji Wang
A1 - Jia-shi Yang
J0 - Journal of Zhejiang University Science A
VL - 19
IS - 10
SP - 786
EP - 795
%@ 1673-565X
Y1 - 2018
PB - Zhejiang University Press & Springer
ER -
DOI - 10.1631/jzus.A1700396


Abstract: 
We propose a new structure of ZnO or AlN thin film bulk acoustic wave filters using a ring-dot driving electrode operating with thickness-extensional modes. A theoretical analysis is performed to show the operating frequencies and modes of the proposed filter. The scalar differential equation by Tiersten and Stevens (1983) is used. An analytical solution is obtained. Numerical calculations based on the solution show that the vibration tends to be trapped in the electroded central and annular areas and decays away from the electrode edges. It is also shown that by properly designing the electrode dimensions and mass density, the nodal line of one of the two operating modes can be adjusted to lie in the gap between the ring and the dot driving electrodes which is ideal for a filter.

This is an exceptionally well crafted manuscript of which you should be justifiably proud. The technical content is clearly and articulately laid out, and the English language presentation is nearly flawless.

具有环形-圆形电极的薄膜体声波滤波器

目的:研发一种新型氧化锌薄膜体声波滤波器,建模进行理论分析,并给出设计工具.
创新点:提出一种氧化锌薄膜体声波滤波器的新结构.
方法:用Tiersten-Stevens方程进行理论分析与计算; 方程及其求解和计算简单易行.
结论:具有环形-圆形电极的氧化锌薄膜可以作为体声波滤波器. 圆形和环形电极具有简单和易加工等优点,并且工作模态的振动分布与材料的对称性高度一致,避免了矩形电极角点引起的电场集中等缺点. 该滤波器的最优工作状态需要通过精密设计实现,本文提供了理论和计算设计工具.

关键词:薄膜;声波;滤波器

Darkslateblue:Affiliate; Royal Blue:Author; Turquoise:Article

Reference

[1]Bottom VE, 1982. Introduction to Quartz Crystal Unit Design. Van Nostrand Reinhold, New York, USA.

[2]Buccela C, Santis VD, Feliziani M, et al., 2008. Finite element modelling of a thin-film bulk acoustic resonator (FBAR). COMPEL-The International Journal for Computation and Mathematics in Electrical and Electronic Engineering, 27(6):1296-1306.

[3]Campanella H, Martubcic E, Nouet P, et al., 2009. Analytical and finite-element modeling of localized-mass sensitivity of thin-film bulk acoustic-wave resonators (FBAR). IEEE Sensors Journal, 9(8):892-901.

[4]Campbell CK, 1998. Surface Acoustic Wave Devices for Mobile and Wireless Communications. Academic Press, Orlando, FL, USA.

[5]de Santis V, Feliziani M, Buccella C, et al., 2009. Prototype design of a thin-film bulk acoustic-wave resonator by the finite element method. IEEE Transactions on Magnetics, 45(3):1116-1119.

[6]Du JK, Xian K, Wang J, et al., 2009. Thickness vibration of piezoelectric plates of 6 mm crystals with tilted six-fold axis and two-layered thick electrodes. Ultrasonics, 49(2):149-152.

[7]Fu YQ, Luo JK, Du XY, et al., 2010. Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review. Sensors and Actuators B: Chemical, 143(2):606-619.

[8]Gong X, Han M, Shang XL, et al., 2007. Two-dimensional analysis of spurious modes in aluminum nitride film resonators. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 54(6):1171-1176.

[9]Hashimoto KY, 2000. Surface Acoustic Wave Devices in Telecommunications. Springer, Berlin Heidelberg, Germany.

[10]Iriarte GF, Engelmark F, Katardjiev IV, 2002. Reactive sputter deposition of highly oriented AlN films at room temperature. Journal of Materials Research, 17(6):1469-1475.

[11]Jung JH, Lee YH, Lee JH, et al., 2003. Vibration-mode analysis of an RF film-bulk-acoustic-wave resonator by using the finite element method. Journal of the Korean Physical Society, 43(5):L648-L650.

[12]Katus P, Reindl LM, 2010. Reduced order finite element models of bulk acoustic wave resonators. Proceedings of 2009 IEEE International Ultrasonics Symposium, p.2123-2128.

[13]Kumar Y, Singh J, Kumari G, et al., 2016. Effect of shapes and electrode material on figure of merit (FOM) of BAW resonator. AIP Conference Proceedings, 1724:020045.

[14]Lakin KM, 1999. Thin film resonators and filters. Proceedings of 1999 IEEE Ultrasonics Symposium, p.895-906.

[15]Lakin KM, Kline GR, McCarron KT, 1995. Development of miniature filters for wireless applications. IEEE Transactions on Microwave Theory and Techniques, 43(12):2933-2939.

[16]Link M, Schreiter M, Weber J, et al., 2006. Solidly mounted ZnO shear mode film bulk acoustic resonators for sensing applications in liquids. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 53(2):492-496.

[17]Liu J, Du JK, Wang J, et al., 2017. Long thickness-extensional waves in thin film bulk acoustic wave filters affected by interdigital electrodes. Ultrasonics, 75:226-232.

[18]Martin F, Jan ME, Rey-Mermet S, et al., 2006. Shear mode coupling and tilted grain growth of A1N thin films in BAW resonators. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 53(7):1339-1343.

[19]Meltaus J, Pensala T, Kokkonen K, 2012. Parametric study of laterally acoustically coupled bulk acoustic wave filters. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 59(12):2742-2751.

[20]Pan WL, Thakar VA, Rais-Zadeh M, et al., 2012. Acoustically coupled thickness-mode AIN-on-Si band-pass filters-part I: principle and devices. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 59(10):2262-2269.

[21]Pang W, Zhang H, Kim ES, 2005. Micromachined acoustic wave resonator isolated from substrate. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 52(8):1239-1246.

[22]Qin LF, Chen QM, Cheng HB, et al., 2010. Analytical study of dual-mode thin film bulk acoustic resonators (FBARs) based on ZnO and AlN films with tilted c-axis orientation. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 57(8):1840-1853.

[23]Salt D, 1987. Hy-Q Handbook of Quartz Crystal Devices. Van Nostrand Reinhold, Wokingham, Berkshire, UK.

[24]Satoh Y, Nishihara T, Yokoyama T, et al., 2005. Development of piezoelectric thin film resonator and its impact on future wireless communication systems. Japanese Journal of Applied Physics, 44(5A):2883-2894.

[25]Thakar VA, Pan WL, Ayazi F, et al., 2012. Acoustically coupled thickness-mode AIN-on-Si band-pass filters-part II: simulation and analysis. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 59(10):2270-2277.

[26]Tiersten HF, Stevens DS, 1983. An analysis of thickness-extensional trapped energy resonant device structures with rectangular electrodes in the piezoelectric thin film on silicon configuration. Journal of Applied Physics, 54(10):5893-5910.

[27]Wang K, Koelle U, Larson JD, et al., 2015. FBAR laterally coupled resonator filter. Proceedings of 2015 IEEE International Ultrasonics Symposium, p.466-473.

[28]Yang JS, Xue H, Hu YT, 2007. Finite element analysis of stress field concentration near the edge of an electrode. Ferroelectrics Letters Section, 34(3-4):108-111.

[29]Zhang HF, Kosinski JA, 2012. Analysis of thickness vibrations of c-axis inclined zig-zag two-layered zinc oxide thin-film resonators. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 59(12):2831-2836.

[30]Zhang HF, Bao YY, 2014. Sensitivity analysis of multi-layered C-axis inclined zigzag zinc oxide thin-film resonators as viscosity sensors. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 61(3):525-534.

[31]Zhang HF, Turner JA, Kosinski JA, 2010. Analysis of thickness vibrations of c-axis inclined aluminum-nitrogen thin film resonators. Integrated Ferroelectrics, 113(1):95-108.

[32]Zhao ZN, Qian ZH, Wang B, et al., 2015. Energy trapping of thickness-extensional modes in thin film bulk acoustic wave resonators. Journal of Mechanical Science and Technology, 29(7):2767-2773.

[33]Zhao ZN, Qian ZH, Wang B, 2016a. Energy trapping of thickness-extensional modes in thin film bulk acoustic wave filters. AIP Advances, 6(1):015002.

[34]Zhao ZN, Qian ZH, Wang B, 2016b. Vibration optimization of ZnO thin film bulk acoustic resonator with ring electrodes. AIP Advances, 6(4):045201.

Open peer comments: Debate/Discuss/Question/Opinion

<1>

Please provide your name, email address and a comment





Journal of Zhejiang University-SCIENCE, 38 Zheda Road, Hangzhou 310027, China
Tel: +86-571-87952783; E-mail: cjzhang@zju.edu.cn
Copyright © 2000 - 2024 Journal of Zhejiang University-SCIENCE