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CLC number: TH711; TB92

On-line Access: 2013-04-03

Received: 2012-10-09

Revision Accepted: 2013-01-09

Crosschecked: 2013-03-11

Cited: 4

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Citations:  Bibtex RefMan EndNote GB/T7714

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Journal of Zhejiang University SCIENCE C 2013 Vol.14 No.4 P.252-257


A planar capacitive sensor for 2D long-range displacement measurement

Author(s):  Jian-ping Yu, Wen Wang, Ke-qing Lu, De-qing Mei, Zi-chen Chen

Affiliation(s):  Department of Mechanical Engineering, Zhejiang University, Hangzhou 310027, China; more

Corresponding email(s):   wangwn@hdu.edu.cn

Key Words:  Planar capacitive sensor (PCS), Displacement measurement, 2D large-scale measurement

Jian-ping Yu, Wen Wang, Ke-qing Lu, De-qing Mei, Zi-chen Chen. A planar capacitive sensor for 2D long-range displacement measurement[J]. Journal of Zhejiang University Science C, 2013, 14(4): 252-257.

@article{title="A planar capacitive sensor for 2D long-range displacement measurement",
author="Jian-ping Yu, Wen Wang, Ke-qing Lu, De-qing Mei, Zi-chen Chen",
journal="Journal of Zhejiang University Science C",
publisher="Zhejiang University Press & Springer",

%0 Journal Article
%T A planar capacitive sensor for 2D long-range displacement measurement
%A Jian-ping Yu
%A Wen Wang
%A Ke-qing Lu
%A De-qing Mei
%A Zi-chen Chen
%J Journal of Zhejiang University SCIENCE C
%V 14
%N 4
%P 252-257
%@ 1869-1951
%D 2013
%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.C12MNT03

T1 - A planar capacitive sensor for 2D long-range displacement measurement
A1 - Jian-ping Yu
A1 - Wen Wang
A1 - Ke-qing Lu
A1 - De-qing Mei
A1 - Zi-chen Chen
J0 - Journal of Zhejiang University Science C
VL - 14
IS - 4
SP - 252
EP - 257
%@ 1869-1951
Y1 - 2013
PB - Zhejiang University Press & Springer
ER -
DOI - 10.1631/jzus.C12MNT03

A planar capacitive sensor (PCS) capable of 2D large-scale measurement is presented in this paper. Displacement interpretation depends on independently measuring the periodic variation in capacitance caused by the change in the overlapping area of sensing electrodes on a moving plate and a fixed plate. By accumulating the number of quarters in each direction and the specific position in the final quarter, the large-scale measurement is fulfilled. Displacements in X- and Y-direction can be measured independently and simultaneously. Simulation shows that a shorter gap distance and a longer electrode guarantee better sensitivity. Experiments based on a PCS test bench demonstrate that the PCS has a sensitivity of 0.198 mV/µm and a resolution of 0.308 µm. An electric fringe effect and other possible measurement errors on displacement interpretation accuracy are discussed. The study confirms the high potential of PCSs as innovative 2D long-range displacement sensors.

Darkslateblue:Affiliate; Royal Blue:Author; Turquoise:Article


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