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CLC number: TH711; TB92

On-line Access: 2013-04-03

Received: 2012-10-09

Revision Accepted: 2013-01-09

Crosschecked: 2013-03-11

Cited: 4

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Journal of Zhejiang University SCIENCE C 2013 Vol.14 No.4 P.252-257

http://doi.org/10.1631/jzus.C12MNT03


A planar capacitive sensor for 2D long-range displacement measurement


Author(s):  Jian-ping Yu, Wen Wang, Ke-qing Lu, De-qing Mei, Zi-chen Chen

Affiliation(s):  Department of Mechanical Engineering, Zhejiang University, Hangzhou 310027, China; more

Corresponding email(s):   wangwn@hdu.edu.cn

Key Words:  Planar capacitive sensor (PCS), Displacement measurement, 2D large-scale measurement


Jian-ping Yu, Wen Wang, Ke-qing Lu, De-qing Mei, Zi-chen Chen. A planar capacitive sensor for 2D long-range displacement measurement[J]. Journal of Zhejiang University Science C, 2013, 14(4): 252-257.

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author="Jian-ping Yu, Wen Wang, Ke-qing Lu, De-qing Mei, Zi-chen Chen",
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%A Wen Wang
%A Ke-qing Lu
%A De-qing Mei
%A Zi-chen Chen
%J Journal of Zhejiang University SCIENCE C
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%P 252-257
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%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.C12MNT03

TY - JOUR
T1 - A planar capacitive sensor for 2D long-range displacement measurement
A1 - Jian-ping Yu
A1 - Wen Wang
A1 - Ke-qing Lu
A1 - De-qing Mei
A1 - Zi-chen Chen
J0 - Journal of Zhejiang University Science C
VL - 14
IS - 4
SP - 252
EP - 257
%@ 1869-1951
Y1 - 2013
PB - Zhejiang University Press & Springer
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DOI - 10.1631/jzus.C12MNT03


Abstract: 
A planar capacitive sensor (PCS) capable of 2D large-scale measurement is presented in this paper. Displacement interpretation depends on independently measuring the periodic variation in capacitance caused by the change in the overlapping area of sensing electrodes on a moving plate and a fixed plate. By accumulating the number of quarters in each direction and the specific position in the final quarter, the large-scale measurement is fulfilled. Displacements in X- and Y-direction can be measured independently and simultaneously. Simulation shows that a shorter gap distance and a longer electrode guarantee better sensitivity. Experiments based on a PCS test bench demonstrate that the PCS has a sensitivity of 0.198 mV/µm and a resolution of 0.308 µm. An electric fringe effect and other possible measurement errors on displacement interpretation accuracy are discussed. The study confirms the high potential of PCSs as innovative 2D long-range displacement sensors.

Darkslateblue:Affiliate; Royal Blue:Author; Turquoise:Article

Reference

[1]Baxter, L.K., 1997. Capacitive Sensors: Design and Applications. IEEE Press, Piscataway, NJ.

[2]Benedek, P., Silvester, P., 1972. Capacitance of parallel rectangular plates separated by a dielectric sheet. IEEE Trans. Microw. Theory Tech., 20(8):504-510.

[3]Bonse, M.H.W., Zhu, F., Spronck, J.W., 1994. A new two-dimensional capacitive position transducer. Sens. Actuat. A, 41(1-3):29-32.

[4]Chang, S., Lee, J., 2010. Design of a long range nano-scale resolution mechanism. J. Zhejiang Univ.-Sci. A (Appl. Phys. & Eng.), 11(4):250-254.

[5]Furuichi, H., Fearing, R.S., 1996. A Planar Capacitive Micro Positioning Sensor. Proc. 7th Int. Symp. on Micro Machine and Human Science, p.85-90.

[6]Huang, X.H., Lee, J.I., Ramakrishnan, N., Bedillion, M., Chu, P., 2010. Nano-positioning of an electromagnetic scanner with a MEMS capacitive sensor. Mechatronics, 20(1):27-34.

[7]Kim, M., Moon, W., 2006. A new linear encoder-like capacitive displacement sensor. Measurement, 39(6):481-489.

[8]Kolb, P.W., Decca, R.S., Drew, H.D., 1998. Capacitive sensor for micropositioning in two dimensions. Rev. Sci. Instrum., 69(1):310-312.

[9]Kuijpers, A.A., Krijnen, G.J.M., Wiegerink, R.J., Lammerink, T.S.J., Elwenspoek, M., 2006. A micromachined capacitive incremental position sensor. J. Micromech. Microeng., 16(6):S116-124.

[10]Meyer, H.U., 1996. An integrated capacitive position sensor. IEEE Trans. Instrum. Meas., 45(2):521-525.

[11]Pedrocchi, A., Hoen, S., Ferrigno, G., Pedotti, A., 2000. Perspectives on MEMS in bioengineering: a novel capacitive position microsensor. IEEE Trans. Biomed. Eng., 47(1):8-11.

[12]Picotto, G.B., Pisani, M., Sosso, A., 2009. A multi-electrode plane capacitive sensor for displacement measurements and attitude controls. Meas. Sci. Technol., 20(8):1-4.

[13]Tolles, W.M., 1996. Nanoscience and nanotechnology in Europe. Nanotechnology, 7(2):59-105.

[14]Wang, W., Li, X.X., Chen, Z.C., 2008. A planar capacitive sensor for large scale measurement. Key Eng. Mater., 381-382:509-512.

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