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CLC number: TP212

On-line Access: 2013-04-03

Received: 2012-09-20

Revision Accepted: 2013-01-14

Crosschecked: 2013-03-12

Cited: 22

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Citations:  Bibtex RefMan EndNote GB/T7714

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Journal of Zhejiang University SCIENCE C 2013 Vol.14 No.4 P.258-263

http://doi.org/10.1631/jzus.C12MNT04


Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology


Author(s):  Ji-jun Xiong, Shi-jun Zheng, Ying-ping Hong, Jun Li, Ying-lin Wang, Wei Wang, Qiu-lin Tan

Affiliation(s):  Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Taiyuan 030051, China; more

Corresponding email(s):   xiongjijun@nuc.edu.cn, tanqiulin.99@163.com

Key Words:  High temperature co-fired ceramic (HTCC), Wireless, Micro-electro-mechanical systems (MEMS)


Ji-jun Xiong, Shi-jun Zheng, Ying-ping Hong, Jun Li, Ying-lin Wang, Wei Wang, Qiu-lin Tan. Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology[J]. Journal of Zhejiang University Science C, 2013, 14(4): 258-263.

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author="Ji-jun Xiong, Shi-jun Zheng, Ying-ping Hong, Jun Li, Ying-lin Wang, Wei Wang, Qiu-lin Tan",
journal="Journal of Zhejiang University Science C",
volume="14",
number="4",
pages="258-263",
year="2013",
publisher="Zhejiang University Press & Springer",
doi="10.1631/jzus.C12MNT04"
}

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%T Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology
%A Ji-jun Xiong
%A Shi-jun Zheng
%A Ying-ping Hong
%A Jun Li
%A Ying-lin Wang
%A Wei Wang
%A Qiu-lin Tan
%J Journal of Zhejiang University SCIENCE C
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%P 258-263
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%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.C12MNT04

TY - JOUR
T1 - Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology
A1 - Ji-jun Xiong
A1 - Shi-jun Zheng
A1 - Ying-ping Hong
A1 - Jun Li
A1 - Ying-lin Wang
A1 - Wei Wang
A1 - Qiu-lin Tan
J0 - Journal of Zhejiang University Science C
VL - 14
IS - 4
SP - 258
EP - 263
%@ 1869-1951
Y1 - 2013
PB - Zhejiang University Press & Springer
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DOI - 10.1631/jzus.C12MNT04


Abstract: 
High temperature co-fired ceramics (HTCCs) have wide applications with stable mechanical properties, but they have not yet been used to fabricate sensors. By introducing the wireless telemetric sensor system and ceramic structure embedding a pressure-deformable cavity, the designed sensors made from HTCC materials (zirconia and 96% alumina) are fabricated, and their capacities for the pressure measurement are tested using a wireless interrogation method. Using the fabricated sensor, a study is conducted to measure the atmospheric pressure in a sealed vessel. The experimental sensitivity of the device is 2 Hz/Pa of zirconia and 1.08 Hz/Pa of alumina below 0.5 MPa with a readout distance of 2.5 cm. The described sensor technology can be applied for monitoring of atmospheric pressure to evaluate important component parameters in harsh environments.

Darkslateblue:Affiliate; Royal Blue:Author; Turquoise:Article

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