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CLC number: TP212.1

On-line Access: 2013-04-03

Received: 2012-10-08

Revision Accepted: 2013-01-14

Crosschecked: 2013-03-18

Cited: 1

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Journal of Zhejiang University SCIENCE C 2013 Vol.14 No.4 P.264-273

10.1631/jzus.C12MNT05


High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation


Author(s):  Jun Xu, Xin Li, Jin-hua Duan, Hai-bo Xu

Affiliation(s):  College of Automation, Harbin University of Science and Technology, Harbin 150080, China; more

Corresponding email(s):   hljlgxj@126.com, lixin68@hrbust.edu.cn

Key Words:  Tuning fork, ZY-cut quartz, Quartz micromachining, Thermal sensing, Temperature sensor


Jun Xu, Xin Li, Jin-hua Duan, Hai-bo Xu. High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation[J]. Journal of Zhejiang University Science C, 2013, 14(4): 264-273.

@article{title="High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation",
author="Jun Xu, Xin Li, Jin-hua Duan, Hai-bo Xu",
journal="Journal of Zhejiang University Science C",
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pages="264-273",
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publisher="Zhejiang University Press & Springer",
doi="10.1631/jzus.C12MNT05"
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%T High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation
%A Jun Xu
%A Xin Li
%A Jin-hua Duan
%A Hai-bo Xu
%J Journal of Zhejiang University SCIENCE C
%V 14
%N 4
%P 264-273
%@ 1869-1951
%D 2013
%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.C12MNT05

TY - JOUR
T1 - High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation
A1 - Jun Xu
A1 - Xin Li
A1 - Jin-hua Duan
A1 - Hai-bo Xu
J0 - Journal of Zhejiang University Science C
VL - 14
IS - 4
SP - 264
EP - 273
%@ 1869-1951
Y1 - 2013
PB - Zhejiang University Press & Springer
ER -
DOI - 10.1631/jzus.C12MNT05


Abstract: 
This paper presents the design, fabrication, and characterization of a quartz tuning fork temperature sensor based on a new ZY-cut quartz crystal bulk acoustic wave resonator vibrating in a flexural mode. Design and performance analysis of the quartz tuning fork temperature sensor were conducted and the thermal sensing characteristics were examined by measuring the resonance frequency shift of this sensor caused by an external temperature. Finite element method is used to analyze the vibratory modes and optimize the structure of the sensor. The sensor prototype was successfully fabricated and calibrated in operation from 0 to 100 °C with the thermo-sensitivity of 70×10−6/°C. Experimental results show that the sensor has high thermo-sensitivity, good stability, and good reproducibility. This work presents a high-precision low-power temperature sensor using the comprehensive thermal characterization of the ZY-cut quartz tuning fork resonator.

Darkslateblue:Affiliate; Royal Blue:Author; Turquoise:Article

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