Deep search:Searching for "Optical proximity correction "OPC"" in 'KEYWORDGot 2 items.
index Title
1
Author(s):Bin Lin, Xiao-lang Yan, Zheng Shi,...  Clicked:8428  Download:3938  Cited:4  <Full Text>
Journal of Zhejiang University Science C  2011 Vol.12 No.5 P.436-442  DOI:10.1631/jzus.C1000219
2
Author(s):Kai-sheng Luo, Zheng Shi, Xiao-lan...  Clicked:7412  Download:3234  Cited:5  <Full Text>  <PPT> 2021
Journal of Zhejiang University Science C  2014 Vol.15 No.5 P.390-400  DOI:10.1631/jzus.C1300357
Journal of Zhejiang University-SCIENCE, 38 Zheda Road, Hangzhou 310027, China
Tel: +86-571-87952783; E-mail: cjzhang@zju.edu.cn
Copyright © 2000 - 2024 Journal of Zhejiang University-SCIENCE