Abstract: In the semiconductor manufacturing industry, the dynamic model of a controlled object is usually obtained from a frequency sweeping method before motion control. However, the existing isolators cannot properly isolate the disturbance of the inertial force on the platform base during frequency sweeping (the frequency is between 0 Hz and the natural frequency). In this paper, an adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system (DSA-SAVIS) is proposed. This system has a significant anti-resonance characteristic; that is, the vibration amplitude can drop to nearly zero at a particular frequency, which is called the anti-resonance frequency. The proposed controller is designed to add an adjustable anti-resonance frequency to fully use this unique anti-resonance characteristic. Experimental results show that the closed-loop transmissibility is less than −15 dB from 0 Hz to the initial anti-resonance frequency. Furthermore, it is less than −30 dB around an added anti-resonance frequency which can be adjusted from 0 Hz to the initial anti-resonance frequency by changing the parameters of the proposed controller. With the proposed controller, the disturbance amplitude of the payload decays from 4 to 0.5 mm/s with a reduction of 87.5% for the impulse disturbance applied to the platform base. Simultaneously, the system can adjust the anti-resonance frequency point in real time by tracking the frequency sweeping disturbances, and a good vibration isolation performance is achieved. This indicates that the DSA-SAVIS and the proposed controller can be applied in the guarantee of an ultra-low vibration environment, especially at frequency sweeping in the semiconductor manufacturing industry.

双级驱动半主动隔振系统的可调反共振频率控制器

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