CLC number: TP212
On-line Access: 2022-05-19
Received: 2021-05-12
Revision Accepted: 2022-05-19
Crosschecked: 2021-09-21
Cited: 0
Clicked: 4079
Chen LI, Mangu JIA, Yingping HONG, Yanan XUE, Jijun XIONG. Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for bending structure surfaces[J]. Frontiers of Information Technology & Electronic Engineering,in press.https://doi.org/10.1631/FITEE.2100236 @article{title="Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for bending structure surfaces", %0 Journal Article TY - JOUR
利用微机电系统技术制作弯曲结构表面无线无源柔性加速度计1中北大学电子测试技术重点实验室,中国太原市,030051 2中北大学仪器科学与动态测试教育部重点实验室,中国太原市,030051 摘要:提出一种LC无线无源柔性加速度计,解决测量弯曲结构表面加速度的困难。该加速度计由柔性聚酰亚胺(PI)衬底和平面螺旋电感(厚度为300 nm)组成,采用微机电系统(MEMS)技术,可任意弯曲或折叠,可牢固地粘附在具有弯曲结构的物体表面。利用射频无线传输原理,通过改变加速度计与天线之间的距离来测量加速度信号。与带导线的加速度计相比,该加速度计可以防止导线在振动过程中脱落,从而延长其使用寿命。通过搭建实验平台,当天线与加速度计之间的距离为5 mm时,在弯曲结构表面展示了加速度计在20至100 m/s2加速度下的传感能力。结果表明,加速度和峰峰值输出电压接近线性,加速度计灵敏度高达0.27 mV/(m·s−2)。此外,该加速度计的最大误差小于0.037%。 关键词组: Darkslateblue:Affiliate; Royal Blue:Author; Turquoise:Article
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