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CLC number: TH161.5

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Received: 2001-05-26

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Journal of Zhejiang University SCIENCE A 2002 Vol.3 No.3 P.263~267

http://doi.org/10.1631/jzus.2002.0263


Novel method for detection of anomalous structure characteristics of ID precision ultrathin monocrystalline silicon section cutting tool


Author(s):  CHEN Zong-nong, GUO Ming, WANG Qing-jiu, YU Xue-gong

Affiliation(s):  Department of Mechanical Engineering, Zhejiang University, Hangzhou 310027, China; more

Corresponding email(s):   mdi@cmee.zju.edu.cn

Key Words:  Machine-tool spindle, Bearing, Monocrystalline silicon section, Signal analysis


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CHEN Zong-nong, GUO Ming, WANG Qing-jiu, YU Xue-gong. Novel method for detection of anomalous structure characteristics of ID precision ultrathin monocrystalline silicon section cutting tool[J]. Journal of Zhejiang University Science A, 2002, 3(3): 263~267.

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author="CHEN Zong-nong, GUO Ming, WANG Qing-jiu, YU Xue-gong",
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doi="10.1631/jzus.2002.0263"
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%A CHEN Zong-nong
%A GUO Ming
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%A YU Xue-gong
%J Journal of Zhejiang University SCIENCE A
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T1 - Novel method for detection of anomalous structure characteristics of ID precision ultrathin monocrystalline silicon section cutting tool
A1 - CHEN Zong-nong
A1 - GUO Ming
A1 - WANG Qing-jiu
A1 - YU Xue-gong
J0 - Journal of Zhejiang University Science A
VL - 3
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DOI - 10.1631/jzus.2002.0263


Abstract: 
The structure characteristics of ID precision ultrathin monocrystalline silicon section cutting machine-tool spindle with force-monitoring bearings functioning as force measuring sensors were detected with the new Hilbert theory based signal-wave envelope detection method, presented to replace the conventional hardware device in order to ensure that the signal is measured online with high fidelity. According to the probability of anomalous incidents in the cutting process, a mathematical recognition model has been designed and verified on an STC-22ID machine.

Darkslateblue:Affiliate; Royal Blue:Author; Turquoise:Article

Reference

[1] Bahr, B., Motavalli, S., 1997. Sensor fusion for monitoring machine tool conditions. Int. J. Computer Integrated-Manufacturing, 10(5): 314-323

[2] Chen Zongnong, 1992. The principle and application of force-monitoring bearings. Bearing, 6: 9-12

[3] Glockner, H. 1985. Force-monitoring for machine-tool spindles. Ball Bearing Journal, 25: 78-92

[4] Guo Ming, 1993. On-line Machine-tool State Monitoring with Force-monitoring Bearings. Master's thesis, Zhejiang University, Hangzhou, China

[5] Kegg R, 1993. On-line machine and process diagnostics. Annuals of the CIRP, 42(2): 132-137

[6] Liu Dunyan, Shao Hua, 2000. Cutting power modeling in turning based on cutting parameters and tool condition. Machine Design and Research, 32(1): 68-69,65

[7] Nair, R. Darai, K. Malkin, S. 1992. The turning process identification through force transients. Journal of Engineering for Industry, 114: 1-7

[8] Novak, A., Wiklund H., 1996. On-line prediction of the tool life. Annals of CIRP, 45(1): 93-96

[9] Shun Yueming, Tang Renzhong, 1991. Mechanical Vibration Theory, Zhejiang University Publishing Press.

[10] Wang, Z., 1993. The present situation of silicon-related material manufacturing machines at home and abroad. The Special Equipment in Electronic Industry. 4: 57-61

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