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CLC number: TN304.12

On-line Access: 2010-12-09

Received: 2009-12-10

Revision Accepted: 2010-03-26

Crosschecked: 2010-11-04

Cited: 3

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Citations:  Bibtex RefMan EndNote GB/T7714

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Journal of Zhejiang University SCIENCE C 2010 Vol.11 No.12 P.1009-1015

http://doi.org/10.1631/jzus.C0910757


Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system


Author(s):  Xia Zhang, Hao Wang, Xu-dong Zheng, Shi-chang Hu, Zhong-he Jin

Affiliation(s):  Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China, Beijing Institute of Aerospace Control Devices, Beijing 100854, China

Corresponding email(s):   d05zhangxia@zju.edu.cn

Key Words:  Capacitive accelerometer, Micro-electromechanical system (MEMS), Noise, Modeling, Simulation


Xia Zhang, Hao Wang, Xu-dong Zheng, Shi-chang Hu, Zhong-he Jin. Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system[J]. Journal of Zhejiang University Science C, 2010, 11(12): 1009-1015.

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journal="Journal of Zhejiang University Science C",
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doi="10.1631/jzus.C0910757"
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%T Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system
%A Xia Zhang
%A Hao Wang
%A Xu-dong Zheng
%A Shi-chang Hu
%A Zhong-he Jin
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%D 2010
%I Zhejiang University Press & Springer
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T1 - Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system
A1 - Xia Zhang
A1 - Hao Wang
A1 - Xu-dong Zheng
A1 - Shi-chang Hu
A1 - Zhong-he Jin
J0 - Journal of Zhejiang University Science C
VL - 11
IS - 12
SP - 1009
EP - 1015
%@ 1869-1951
Y1 - 2010
PB - Zhejiang University Press & Springer
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DOI - 10.1631/jzus.C0910757


Abstract: 
We analyze the effects of possible noise sources on a fence structure micromachined capacitive accelerometer system by modeling and simulation to improve its performance. simulation results show that a mismatch between the two initial sensing capacitors of the accelerometer or a mismatch between the two capacitance-voltage conversion circuits has a great effect on the output noise floor. When there is a serious mismatch, the noise induced by a sinusoidal carrier is the major noise source. When there is no or only a slight mismatch, the differential capacitance-voltage conversion circuits become the main noise source. The simulation results were validated by experiments and some effective approaches are proposed to improve the system resolution.

Darkslateblue:Affiliate; Royal Blue:Author; Turquoise:Article

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