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CLC number: TH81

On-line Access: 2013-04-03

Received: 2012-09-24

Revision Accepted: 2013-01-07

Crosschecked: 2013-03-22

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Journal of Zhejiang University SCIENCE C 2013 Vol.14 No.4 P.274-278


A trapezoidal cantilever density sensor based on MEMS technology

Author(s):  Li-bo Zhao, Long-qi Xu, Gui-ming Zhang, Yu-long Zhao, Xiao-po Wang, Zhi-gang Liu, Zhuang-de Jiang

Affiliation(s):  State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China; more

Corresponding email(s):   libozhao@mail.xjtu.edu.cn, hezexulongqi@stu.xjtu.edu.cn

Key Words:  Micro-electro-mechanical systems (MEMS), Density sensor, Trapezoidal cantilever, Resonant frequency

Li-bo Zhao, Long-qi Xu, Gui-ming Zhang, Yu-long Zhao, Xiao-po Wang, Zhi-gang Liu, Zhuang-de Jiang. A trapezoidal cantilever density sensor based on MEMS technology[J]. Journal of Zhejiang University Science C, 2013, 14(4): 274-278.

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author="Li-bo Zhao, Long-qi Xu, Gui-ming Zhang, Yu-long Zhao, Xiao-po Wang, Zhi-gang Liu, Zhuang-de Jiang",
journal="Journal of Zhejiang University Science C",
publisher="Zhejiang University Press & Springer",

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%T A trapezoidal cantilever density sensor based on MEMS technology
%A Li-bo Zhao
%A Long-qi Xu
%A Gui-ming Zhang
%A Yu-long Zhao
%A Xiao-po Wang
%A Zhi-gang Liu
%A Zhuang-de Jiang
%J Journal of Zhejiang University SCIENCE C
%V 14
%N 4
%P 274-278
%@ 1869-1951
%D 2013
%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.C12MNT06

T1 - A trapezoidal cantilever density sensor based on MEMS technology
A1 - Li-bo Zhao
A1 - Long-qi Xu
A1 - Gui-ming Zhang
A1 - Yu-long Zhao
A1 - Xiao-po Wang
A1 - Zhi-gang Liu
A1 - Zhuang-de Jiang
J0 - Journal of Zhejiang University Science C
VL - 14
IS - 4
SP - 274
EP - 278
%@ 1869-1951
Y1 - 2013
PB - Zhejiang University Press & Springer
ER -
DOI - 10.1631/jzus.C12MNT06

A trapezoidal cantilever density sensor is developed based on micro-electro-mechanical systems (MEMS) technology. The sensor measures fluid density through the relationship between the density and the resonant frequency of the cantilever immersed in the fluid. To improve the sensitivity of the sensor, the modal and harmonic response analyses of trapezoidal and rectangular cantilevers are simulated by ANSYS software. The higher the resonant frequency of the cantilever immersed in the fluid, the higher the sensitivity of the sensor; the higher the resonant strain value, the easier the detection of the output signal of the sensor. Based on the results of simulation, the trapezoidal cantilever is selected to measure the densities of dimethyl silicone and toluene at the temperature ranges of 30 to 55 °C and 26 to 34 °C, respectively. Experimental results show that the trapezoidal cantilever density sensor has a good performance.

Darkslateblue:Affiliate; Royal Blue:Author; Turquoise:Article


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