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1SVM based layout retargeting for fast and regularized inverse lithography
Author(s):Kai-sheng Luo, Zheng Shi, Xiao-lan...  Clicked:3372  Download:1630  Cited:5  <Full Text>  <PPT> 577
Journal of Zhejiang University Science C  2014 Vol.15 No.5 P.390-400  DOI:10.1631/jzus.C1300357
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