Deep search:Searching for "Optical proximity correction" in 'KEYWORDGot 2 items.
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1A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segment...
Author(s):Bin Lin, Xiao-lang Yan, Zheng Shi,...  Clicked:3903  Download:2322  Cited:4  <Full Text>
Journal of Zhejiang University Science C  2011 Vol.12 No.5 P.436-442  DOI:10.1631/jzus.C1000219
2SVM based layout retargeting for fast and regularized inverse lithography
Author(s):Kai-sheng Luo, Zheng Shi, Xiao-lan...  Clicked:3372  Download:1631  Cited:5  <Full Text>  <PPT> 578
Journal of Zhejiang University Science C  2014 Vol.15 No.5 P.390-400  DOI:10.1631/jzus.C1300357
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