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1An in-plane low-noise accelerometer fabricated with an improved process flow
Author(s):Xu-dong ZHENG, Zhong-he JIN, Yue-l...  Clicked:3432  Download:1835  Cited:7  <Full Text>
Journal of Zhejiang University Science A  2009 Vol.10 No.10 P.1413~1420  DOI:10.1631/jzus.A0820757
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