Deep search:Searching for "inverse lithography technology" in 'ABSTRACT and KEYWORDGot 2 items.
index Title
1Regularized level-set-based inverse lithography algorithm for IC mask synthesis
Author(s):Zhen Geng, Zheng Shi, Xiao-lang Ya...  Clicked:3265  Download:1989  Cited:3  <Full Text>  <PPT> 941
Journal of Zhejiang University Science C  2013 Vol.14 No.10 P.799-807  DOI:10.1631/jzus.C1300050
2SVM based layout retargeting for fast and regularized inverse lithography
Author(s):Kai-sheng Luo, Zheng Shi, Xiao-lan...  Clicked:3372  Download:1630  Cited:5  <Full Text>  <PPT> 577
Journal of Zhejiang University Science C  2014 Vol.15 No.5 P.390-400  DOI:10.1631/jzus.C1300357
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