Full Text:   <1519>

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CLC number: TH822; TH744.3

On-line Access: 2021-12-23

Received: 2020-08-26

Revision Accepted: 2021-04-02

Crosschecked: 2021-10-09

Cited: 0

Clicked: 2496

Citations:  Bibtex RefMan EndNote GB/T7714

 ORCID:

Di Chang

https://orcid.org/0000-0002-2124-8043

Pengcheng Hu

https://orcid.org/0000-0002-2471-7036

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Frontiers of Information Technology & Electronic Engineering  2021 Vol.22 No.12 P.1677-1684

http://doi.org/10.1631/FITEE.2000432


Fused-like angles: replacement for roll-pitch-yaw angles for a six-degree-of-freedom grating interferometer


Author(s):  Di Chang, Pengcheng Hu, Jiubin Tan

Affiliation(s):  Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China; more

Corresponding email(s):   di.chang@hit.edu.cn, hupc@hit.edu.cn, jbtan@hit.edu.cn

Key Words:  Fused-like angles, Grating interferometer, Six-degree-of-freedom measurement, Representation of orientation


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Di Chang, Pengcheng Hu, Jiubin Tan. Fused-like angles: replacement for roll-pitch-yaw angles for a six-degree-of-freedom grating interferometer[J]. Frontiers of Information Technology & Electronic Engineering, 2021, 22(12): 1677-1684.

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Abstract: 
representation of orientation is important in a six-degree-of-freedom grating interferometer but only a few studies have focused on this topic. Roll-pitch-yaw angles, widely used in aviation, navigation, and robotics, are now being brought to the field of multi-degree-of-freedom interferometric measurement. However, the roll-pitch-yaw angles are not the exact definitions the metrologists expected in interferometry, because they require a certain sequential order of rotations and may cause errors in describing complicated rotations. The errors increase as the tip and tilt angles of the grating increase. Therefore, a replacement based on fused angles in robotics is proposed and named “fused-like angles.” The fused-like angles are error-free, so they are more in line with the definitions in grating interferometry and more suitable for six-degree-of-freedom measurements. fused-like angles have already been used in research on the kinematic model and decoupling algorithm of the six-degree-of-freedom grating interferometer.

六自由度光栅干涉仪中的无偏溯源角表达法

常笛1,2,胡鹏程1,2,谭久彬1,2
1哈尔滨工业大学超精密光电仪器工程研究所,中国哈尔滨市,150080
2工信部超精密仪器技术及智能化重点实验室(哈尔滨工业大学),中国哈尔滨市,150080
摘要:光栅姿态角表达方法是六自由度光栅干涉测量的重要课题,但仅有少量相关研究。目前,广泛用于航空航天、导航和机器人领域的导航角(roll-pitch-yaw)被引入六自由度光栅干涉测量领域。然而,因导航角存在固有旋转顺序,在描述绕多个测量轴的复杂旋转时会引起溯源偏差,且该偏差随光栅偏摆角度增加而增大,并不符合干涉系统中的精确定义。基于机器人领域的融合角(fused angles)表达法,本文提出"无偏溯源角(fused-like angles)"表达法,因无偏溯源角不会引起溯源偏差,更加符合光栅干涉仪中的定义,从而更适合六自由度测量。提出的无偏溯源角已应用于六自由度光栅干涉的运动模型和解耦算法研究。

关键词:无偏溯源角;光栅干涉仪;六自由度测量;角度表达方法

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Reference

[1]Allgeuer P, Behnke S, 2015. Fused angles: a representation of body orientation for balance. IEEE/RSJ Int Conf on Intelligent Robots and Systems, p.366-373.

[2]Allgeuer P, Behnke S, 2018. Fused angles and the deficiencies of Euler angles. IEEE/RSJ Int Conf on Intelligent Robots and Systems, p.5109-5116.

[3]Chang D, Xing X, Hu PC, et al., 2019. Double-diffracted spatially separated heterodyne grating interferometer and analysis on its alignment tolerance. Appl Sci, 9(2):263.

[4]Cheng F, Fan KC, 2011. Linear diffraction grating interferometer with high alignment tolerance and high accuracy. Appl Opt, 50(22):4550-4556.

[5]de Jong F, van der Pasch B, Castenmiller T, et al., 2009. Enabling the lithography roadmap: an immersion tool based on a novel stage positioning system. Proc Optical Microlithography XXII, 7274:72741S.

[6]Hsieh HL, Pan SW, 2015. Development of a grating-based interferometer for six-degree-of-freedom displacement and angle measurements. Opt Expr, 23(3):2451-2465.

[7]Hu PC, Chang D, Tan JB, et al., 2019. Displacement measuring grating interferometer: a review. Front Inform Technol Electron Eng, 20(5):631-654.

[8]Li XH, Shimizu Y, Ito T, et al., 2014. Measurement of six-degree-of-freedom planar motions by using a multiprobe surface encoder. Opt Eng, 53(12):122405.

[9]Ye WN, Zhang M, Zhu Y, et al., 2018. Translational displacement computational algorithm of the grating interferometer without geometric error for the wafer stage in a photolithography scanner. Opt Expr, 26(26):34734-34752.

[10]Ye WN, Zhang M, Zhu Y, et al., 2019. Ultraprecision real-time displacements calculation algorithm for the grating interferometer system. Sensors, 19(10):2409.

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