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Journal of Zhejiang University SCIENCE A 2006 Vol.7 No.8 P.1436~1439


Chemically processed Nb-doped SrTiO3 films and properties

Author(s):  YIN Ming-zhi

Affiliation(s):  Applied Chemicals Department, Northwest Polytechnique University, Xi’ more

Corresponding email(s):   ymingzhi@nwpu.edu.cn

Key Words:  SrNbxTi1&minus, xO3 (SNTO) film, Sol-gel technique, Donor-doping-semiconductor

YIN Ming-zhi. Chemically processed Nb-doped SrTiO3 films and properties[J]. Journal of Zhejiang University Science A, 2006, 7(8): 1436~1439.

@article{title="Chemically processed Nb-doped SrTiO3 films and properties",
author="YIN Ming-zhi",
journal="Journal of Zhejiang University Science A",
publisher="Zhejiang University Press & Springer",

%0 Journal Article
%T Chemically processed Nb-doped SrTiO3 films and properties
%A YIN Ming-zhi
%J Journal of Zhejiang University SCIENCE A
%V 7
%N 8
%P 1436~1439
%@ 1673-565X
%D 2006
%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.2006.A1436

T1 - Chemically processed Nb-doped SrTiO3 films and properties
A1 - YIN Ming-zhi
J0 - Journal of Zhejiang University Science A
VL - 7
IS - 8
SP - 1436
EP - 1439
%@ 1673-565X
Y1 - 2006
PB - Zhejiang University Press & Springer
ER -
DOI - 10.1631/jzus.2006.A1436

Homogeneous, crack-free srNbxTi1&minus;xO3 thin films on (110) silicon substrates were successfully fabricated by sol-gel processing. The optimum route and conditions were systematically investigated. Sr(OAc)2 glacial acetic acid solution, after being refluxed and reacted with tartrate, formed Sr(OAc)2(C4H6O6)2; Ti(OBu)4 formed Ti(OAc)4−x(AcAc)x after having the ligand partially exchanged with AcAc, while Nb(OC2H5)5 formed (OAc)2Nb(AcAc) (C4H6O6) by exchanging of ligand in glacial acetic acid with (CH3CO)2O. All the metal species after undergoing partial hydrolysis and polymerization with hydroxyl or oxygen, formed srNbxTi1&minus;xO3 cluster sol. Methyl cellulose (MCL) caused srNbxTi1&minus;xO3 sol to have polymeric structure and easily form films. srNbxTi1&minus;xO3 films with perovskite were subsequently formed after being annealed at 650~750 °C for 60 min in 25% N2+75% H2 (volume ratio) atmosphere. Resistivity of the SrNb0.1Ti0.9O3 films at room temperature was 64 μΩ∙cm, a particular T2 temperature dependence of the resistivity, from 25 K up to room temperature, was observed.

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