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| 1 | A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segment... Author(s):Bin Lin, Xiao-lang Yan, Zheng Shi,... Clicked:11101 Download:5396 Cited:4 <Full Text> Journal of Zhejiang University Science C 2011 Vol.12 No.5 P.436-442 DOI:10.1631/jzus.C1000219 |