Deep search:Searching for "optical proximity correction" in 'ABSTRACT and KEYWORDGot 3 items.
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1A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segment...
Author(s):Bin Lin, Xiao-lang Yan, Zheng Shi,...  Clicked:8592  Download:3975  Cited:4  <Full Text>
Journal of Zhejiang University Science C  2011 Vol.12 No.5 P.436-442  DOI:10.1631/jzus.C1000219
2Regularized level-set-based inverse lithography algorithm for IC mask synthesis
Author(s):Zhen Geng, Zheng Shi, Xiao-lang Ya...  Clicked:7124  Download:3572  Cited:3  <Full Text>  <PPT> 2208
Journal of Zhejiang University Science C  2013 Vol.14 No.10 P.799-807  DOI:10.1631/jzus.C1300050
3SVM based layout retargeting for fast and regularized inverse lithography
Author(s):Kai-sheng Luo, Zheng Shi, Xiao-lan...  Clicked:7628  Download:3286  Cited:5  <Full Text>  <PPT> 2080
Journal of Zhejiang University Science C  2014 Vol.15 No.5 P.390-400  DOI:10.1631/jzus.C1300357
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