CLC number: TP212.3
On-line Access: 2024-08-27
Received: 2023-10-17
Revision Accepted: 2024-05-08
Crosschecked: 2014-04-11
Cited: 6
Clicked: 11804
Jing-jing Wang, Wei-hui Liu, Da Chen, Yan Xu, Lu-yin Zhang. A micro-machined thin film electro-acoustic biosensor for detection of pesticide residuals[J]. Journal of Zhejiang University Science C,in press.Frontiers of Information Technology & Electronic Engineering,in press.https://doi.org/10.1631/jzus.C1300289 @article{title="A micro-machined thin film electro-acoustic biosensor for detection of pesticide residuals", %0 Journal Article TY - JOUR
基于薄膜电声谐振器的农药残留传感器创新要点:将ZnO压电薄膜作为产生GHz频段体声波谐振的功能层,通过设计激励电极,实现了在水中具有高Q值和高灵敏度的剪切波模式质量敏感换能器。在器件表面组装具有特异敏感性的生物抗体,实现对待测物质的生物识别;采用基于竞争性免疫反应的检测方法,达到对典型农药2×10−10 M的检测极限。 器件特色:基于薄膜电声谐振器的生物传感器,采用标准硅基半导体工艺进行制造,能够容易地实现大规模阵列和集成化。由于压电薄膜的谐振频率高,质量灵敏性比传统石英晶体高2个数量级。器件采用横向激励的剪切波模式谐振,在反应液中的Q值达到470,为生物免疫反应的在线检测提供了高性能的质量敏感平台。器件以生物免疫分子作为特异性吸附的功能层,采用竞争性反应吸附检测方法,解决了质量敏感的选择性问题。 重要结论:本文结合薄膜体声波电声谐振器的高质量敏感性和生物免疫反应的特异性,实现了一种高性能的农药残留生物传感器。该传感器灵敏度与传统检测方法相当,具有毫米量级器件尺寸,操作方法简单,并能够在线检测,有望成为目前复杂光学检测系统和电化学系统的替代技术。 关键词组: Darkslateblue:Affiliate; Royal Blue:Author; Turquoise:Article
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