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Bo ZHAO, Wei-jia SHI, Bing-quan WANG, Jiu-bin TAN. An adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system[J]. Frontiers of Information Technology & Electronic Engineering, 1998, -1(-1): .
@article{title="An adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system",
author="Bo ZHAO, Wei-jia SHI, Bing-quan WANG, Jiu-bin TAN",
journal="Frontiers of Information Technology & Electronic Engineering",
volume="-1",
number="-1",
pages="",
year="1998",
publisher="Zhejiang University Press & Springer",
doi="10.1631/FITEE.2000373"
}
%0 Journal Article
%T An adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system
%A Bo ZHAO
%A Wei-jia SHI
%A Bing-quan WANG
%A Jiu-bin TAN
%J Journal of Zhejiang University SCIENCE C
%V -1
%N -1
%P
%@ 2095-9184
%D 1998
%I Zhejiang University Press & Springer
%DOI 10.1631/FITEE.2000373
TY - JOUR
T1 - An adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system
A1 - Bo ZHAO
A1 - Wei-jia SHI
A1 - Bing-quan WANG
A1 - Jiu-bin TAN
J0 - Journal of Zhejiang University Science C
VL - -1
IS - -1
SP -
EP -
%@ 2095-9184
Y1 - 1998
PB - Zhejiang University Press & Springer
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DOI - 10.1631/FITEE.2000373
Abstract: In the semiconductor manufacturing industry, the dynamic model of a controlled object is usually obtained from a frequency-sweep method before motion control. However, the existing isolator cannot properly isolate the disturbance of the inertial force on the platform base during frequency sweeping (the frequency is between 0 Hz and the natural frequency). In this paper, an adjustable anti-resonance frequency controller of a dual-stage actuation semi-active vibration isolation system (DSA-SAVIS) is proposed. This system has a significant anti-resonance characteristic, that is, the vibration amplitude can drop to nearly zero at a particular frequency, which is called the anti-resonance frequency. The proposed controller is designed to add an adjustable anti-resonance frequency to fully utilize this unique anti-resonance characteristic. The experiment results show that the closed-loop transmissibility is less than -15dB from 0 to the initial anti-resonance frequency. Furthermore, it is less than -30dB around an added anti-resonance frequency which can be adjusted from 0 Hz to the initial anti-resonance frequency by changing the parameters of the proposed controller. With the proposed controller, the disturbance amplitude of the payload decays from 4mm/s to 0.5 mm/s with a reduction of 87.5% for the impulse disturbance applied to the platform base. Simultaneously, the system can adjust the anti-resonance frequency point in real time by tracking the frequency-sweep disturbance and achieve good vibration isolation performance. This indicates that the DSA-SAVIS and proposed controller can be applied in the guarantee of an ultra-low vibration environment especially at frequency sweeping in the semiconductor manufacturing industry.
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