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Received: 2008-05-23

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Journal of Zhejiang University SCIENCE A 2009 Vol.10 No.1 P.109-113


Low temperature sintering and performance of aluminum nitride/borosilicate glass

Author(s):  Hong-sheng ZHAO, Lei CHEN, Nian-zi GAO, Kai-hong ZHANG, Zi-qiang LI

Affiliation(s):  Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing 100084, China

Corresponding email(s):   hshzhao@tsinghua.edu.cn

Key Words:  Aluminum nitride (AlN), Borosilicate glass, Low temperature sintering, Performance

Hong-sheng ZHAO, Lei CHEN, Nian-zi GAO, Kai-hong ZHANG, Zi-qiang LI. Low temperature sintering and performance of aluminum nitride/borosilicate glass[J]. Journal of Zhejiang University Science A, 2009, 10(1): 109-113.

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publisher="Zhejiang University Press & Springer",

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%T Low temperature sintering and performance of aluminum nitride/borosilicate glass
%A Hong-sheng ZHAO
%A Nian-zi GAO
%A Kai-hong ZHANG
%A Zi-qiang LI
%J Journal of Zhejiang University SCIENCE A
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%@ 1673-565X
%D 2009
%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.A0820397

T1 - Low temperature sintering and performance of aluminum nitride/borosilicate glass
A1 - Hong-sheng ZHAO
A1 - Lei CHEN
A1 - Nian-zi GAO
A1 - Kai-hong ZHANG
A1 - Zi-qiang LI
J0 - Journal of Zhejiang University Science A
VL - 10
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SP - 109
EP - 113
%@ 1673-565X
Y1 - 2009
PB - Zhejiang University Press & Springer
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DOI - 10.1631/jzus.A0820397

aluminum nitride (AlN)/borosilicate glass composites were prepared by the tape casting process and hot-press sintered at 950 °C with AlN and SiO2-B2O3-ZnO-Al2O3-Li2O glass as starting materials. We characterized and analyzed the variation of the microstructure, bulk density, porosity, dielectric constant, thermal conductivity and thermal expansion coefficient (TEC) of the ceramic samples as a function of AlN content. Results show that AlN and SiO2-B2O3-ZnO-Al2O3-Li2O glass can be sintered at 950 °C, and ZnAl2O4 and Zn2SiO4 phase precipitated to form glass-ceramic. The performance of the ceramic samples was determined by the composition and bulk density of the composites. Lower AlN content was found redounding to liquid phase sintering, and higher bulk density of composites can be accordingly obtained. With the increase of porosity, corresponding decreases were located in the dielectric constant, thermal conductivity and TEC of the ceramic samples. When the mass fraction of AlN was 40%, the ceramic samples possessed a low dielectric constant (4.5~5.0), high thermal conductivity (11.6 W/(m·K)) and a proper TEC (3.0×10−6 K−1, which matched that of silicon). The excellent performance makes this kind of low temperature co-fired ceramic a promising candidate for application in the micro-electronics packaging industry.

Darkslateblue:Affiliate; Royal Blue:Author; Turquoise:Article


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