CLC number: TP212
On-line Access: 2024-08-27
Received: 2023-10-17
Revision Accepted: 2024-05-08
Crosschecked: 2009-02-25
Cited: 3
Clicked: 6556
Dong-lin TANG, Xiao-dong ZHANG, Guang-hui ZHAO, Zhi-yong DAI, Xin LAI, Feng GUO. A novel three-component hybrid-integrated optical accelerometer based on a Mach-Zehnder interferometer with a LiNbO3 photoelastic waveguide[J]. Journal of Zhejiang University Science A, 2009, 10(4): 595-600.
@article{title="A novel three-component hybrid-integrated optical accelerometer based on a Mach-Zehnder interferometer with a LiNbO3 photoelastic waveguide",
author="Dong-lin TANG, Xiao-dong ZHANG, Guang-hui ZHAO, Zhi-yong DAI, Xin LAI, Feng GUO",
journal="Journal of Zhejiang University Science A",
volume="10",
number="4",
pages="595-600",
year="2009",
publisher="Zhejiang University Press & Springer",
doi="10.1631/jzus.A0820420"
}
%0 Journal Article
%T A novel three-component hybrid-integrated optical accelerometer based on a Mach-Zehnder interferometer with a LiNbO3 photoelastic waveguide
%A Dong-lin TANG
%A Xiao-dong ZHANG
%A Guang-hui ZHAO
%A Zhi-yong DAI
%A Xin LAI
%A Feng GUO
%J Journal of Zhejiang University SCIENCE A
%V 10
%N 4
%P 595-600
%@ 1673-565X
%D 2009
%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.A0820420
TY - JOUR
T1 - A novel three-component hybrid-integrated optical accelerometer based on a Mach-Zehnder interferometer with a LiNbO3 photoelastic waveguide
A1 - Dong-lin TANG
A1 - Xiao-dong ZHANG
A1 - Guang-hui ZHAO
A1 - Zhi-yong DAI
A1 - Xin LAI
A1 - Feng GUO
J0 - Journal of Zhejiang University Science A
VL - 10
IS - 4
SP - 595
EP - 600
%@ 1673-565X
Y1 - 2009
PB - Zhejiang University Press & Springer
ER -
DOI - 10.1631/jzus.A0820420
Abstract: An investigation of the properties of a LiNbO3 photoelastic waveguide via the acceleration-induced effect is presented. A novel three-component hybrid-integrated optical accelerometer based on a Mach-Zehnder interferometer with a LiNbO3 photoelastic waveguide has been designed, which is capable of detecting seismic acceleration in high-accuracy seismic exploration. The Mach-Zehnder interferometer was successfully fabricated and a lighting test used to check its quality. The frequency response characteristic of the accelerometer was measured. The accelerometer with a resonant frequency of 3549 Hz was demonstrated to show good linear frequency responding characteristics in the range of 100~3000 Hz. The accelerometer also shows good stability and consistency. Experimental results indicate that the outputs of the on- and cross-axis are 147 and 21.3 mV, respectively.
[1] Burcham, K.E., de Brabander, G.N., Boyd, J.T., 1992. Micro-machined Silicon Cantilever Beam Accelerometer Incorporating an Integrated Optical Waveguide. Proc. SPIE, 1793:12-18.
[2] Cole, J.H., Danver, B.A., Bucaro, J.A., 1982. Synthetic-heterodyne interferometric demodulation. IEEE J. Quant. Electron., 18(4):694-697.
[3] Dandridge, A., Tveten, A.B., Giallorenzi, T.G., 1982. Homodyne demodulation scheme for fiber optic sensor using phase generated carrier. IEEE J. Quant. Electron., 18(10):1647-1653.
[4] Dubey, V.N., Crowder, R.M., 2006. A dynamic tactile sensor on photoelastic effect. Sensors and Actuators A, 128(2):217-224.
[5] Guo, D.G., Wang, W.J., Lin, R.M., 2004. Extrinsic Fabry-Perot Pressure Sensor Using Single Deeply Corrugated Diaphragm Technique. Proc. SPIE, 5346:15-26.
[6] Kiesel, S., van Vickle, P., Peters, K.J., Hassan, T., Kowalsky, M., 2006. Intrinsic Polymer Optical Fiber Sensors for High-strain Applications. Proc. SPIE, 6167, Article 13, p.1-11.
[7] Llobera, A., Plaza, J.A., Salinas, I., Berganzo, J., Garcia, J., Esteve, J., Domínguez, C., 2004. Technological aspects on the fabrication of silicon-based optical accelerometer with ARROW structures. Sensors and Actuators A, 110(1-3):395-400.
[8] Ma, T.W., Zhao, W.B., Liu, J.M., 2007. A MEMS Vibration Sensor Based on Mach Zehnder Interferometers. Proc. SPIE, 6529:2C-1.
[9] Pavelescu, L., 2001. Simplified Design Relationships for Silicon Integrated Optical Pressure Sensors Based on Mach-Zehnder Interferometry with Antiresonant Reflecting Optical Waveguides. Proc. Semiconductor Conf., 1:201-204.
[10] Su, W., Gilbert, J.A., Morrissey, M.D., Song, Y.H., 1997. General-purpose photoelastic fiber optic accelerometer. Opt. Eng., 36(1):22-28.
[11] Tang, D.L., Chen C.H., Cui, Y.M., Ding, G.L., Wang, J.H., Xie, J.Z., 2005. Spring system of three-component photoelastic fiber optic accelerometer. J. Tianjin Univ. Sci. Technol., 38(1):61-64 (in Chinese).
Open peer comments: Debate/Discuss/Question/Opinion
<1>