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Crosschecked: 2009-02-09

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Journal of Zhejiang University SCIENCE A 2009 Vol.10 No.4 P.589~594

http://doi.org/10.1631/jzus.A0820270


High-finesse displacement sensor and a theoretical accelerometer model based on a fiber Fabry-Perot interferometer


Author(s):  Xu ZENG, Yu WU, Chang-lun HOU, Guo-guang YANG

Affiliation(s):  State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China

Corresponding email(s):   zengxu@zju.edu.cn

Key Words:  Fiber Fabry-Perot (F-P) sensor, Spectrum demodulation, Micro-displacement measurement, Accelerometer model


Xu ZENG, Yu WU, Chang-lun HOU, Guo-guang YANG. High-finesse displacement sensor and a theoretical accelerometer model based on a fiber Fabry-Perot interferometer[J]. Journal of Zhejiang University Science A, 2009, 10(4): 589~594.

@article{title="High-finesse displacement sensor and a theoretical accelerometer model based on a fiber Fabry-Perot interferometer",
author="Xu ZENG, Yu WU, Chang-lun HOU, Guo-guang YANG",
journal="Journal of Zhejiang University Science A",
volume="10",
number="4",
pages="589~594",
year="2009",
publisher="Zhejiang University Press & Springer",
doi="10.1631/jzus.A0820270"
}

%0 Journal Article
%T High-finesse displacement sensor and a theoretical accelerometer model based on a fiber Fabry-Perot interferometer
%A Xu ZENG
%A Yu WU
%A Chang-lun HOU
%A Guo-guang YANG
%J Journal of Zhejiang University SCIENCE A
%V 10
%N 4
%P 589~594
%@ 1673-565X
%D 2009
%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.A0820270

TY - JOUR
T1 - High-finesse displacement sensor and a theoretical accelerometer model based on a fiber Fabry-Perot interferometer
A1 - Xu ZENG
A1 - Yu WU
A1 - Chang-lun HOU
A1 - Guo-guang YANG
J0 - Journal of Zhejiang University Science A
VL - 10
IS - 4
SP - 589
EP - 594
%@ 1673-565X
Y1 - 2009
PB - Zhejiang University Press & Springer
ER -
DOI - 10.1631/jzus.A0820270


Abstract: 
A displacement sensor based on the fiber Fabry-Perot (F-P) cavity was proposed in this paper. Theoretical and experimental analyses were presented. Displacement resolution was demonstrated by spectrum-domain experiments to obtain the dynamic range of the F-P sensor, and a piezoelectric crystal unit (PZT) was used as the driver. The output signal was modulated by a piezoelectric ceramic ring and demodulated by a phase-locked oscillator. The experimental results show that the displacement resolution of the F-P sensor is less than 5 nm and the dynamic range is more than 100 μm. As acceleration is the second-order differential of displacement, an accelerometer model was proposed using the finite element method (FEM) and ANSYS software.

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Reference

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[8] Zhang, P., Zhu, Y., Tang, X.C., Chen, W.M., 2005. Demodulation of the optical fiber Fabry-Perot sensor based on Fourier transform. Acta Opt. Sin., 25(2):186-189 (in Chinese).

[9] Zheng, J., Albin, S., 1998. Self-referenced reflective intensity fiber optic displacement sensor. Opt. Eng., 38(2):227-232.

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