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On-line Access: 2022-12-28
Received: 2022-07-10
Revision Accepted: 2022-10-21
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Bioinspired flexible piezoresistive sensor for high-sensitivity detection of broad pressure range
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Meng Wang, Hao Zhang, Han Wu, Suqian Ma, Lei Ren, Yunhong Liang, Chunbao Liu & Zhiwu Han . Bioinspired flexible piezoresistive sensor for high-sensitivity detection of broad pressure range[J]. Journal of Zhejiang University Science D, 2023, 6(3): 243-254.
@article{title="Bioinspired flexible piezoresistive sensor for high-sensitivity detection of broad pressure range",
author="Meng Wang, Hao Zhang, Han Wu, Suqian Ma, Lei Ren, Yunhong Liang, Chunbao Liu & Zhiwu Han ",
journal="Journal of Zhejiang University Science D",
volume="6",
number="3",
pages="243-254",
year="2023",
publisher="Zhejiang University Press & Springer",
doi="10.1007/s42242-022-00220-4"
}
%0 Journal Article
%T Bioinspired flexible piezoresistive sensor for high-sensitivity detection of broad pressure range
%A Meng Wang
%A Hao Zhang
%A Han Wu
%A Suqian Ma
%A Lei Ren
%A Yunhong Liang
%A Chunbao Liu & Zhiwu Han
%J Journal of Zhejiang University SCIENCE D
%V 6
%N 3
%P 243-254
%@ 1869-1951
%D 2023
%I Zhejiang University Press & Springer
%DOI 10.1007/s42242-022-00220-4
TY - JOUR
T1 - Bioinspired flexible piezoresistive sensor for high-sensitivity detection of broad pressure range
A1 - Meng Wang
A1 - Hao Zhang
A1 - Han Wu
A1 - Suqian Ma
A1 - Lei Ren
A1 - Yunhong Liang
A1 - Chunbao Liu & Zhiwu Han
J0 - Journal of Zhejiang University Science D
VL - 6
IS - 3
SP - 243
EP - 254
%@ 1869-1951
Y1 - 2023
PB - Zhejiang University Press & Springer
ER -
DOI - 10.1007/s42242-022-00220-4
Abstract: The human skin has the ability to sense tactile touch and a great range of pressures. Therefore, in prosthetic or robotic systems, it is necessary to prepare pressure sensors with high sensitivity in a wide measurement range to provide human-like tactile sensation. Herein, we developed a flexible piezoresistive pressure sensor that is highly sensitive in a broad pressure range by using lotus leaf micropatterned polydimethylsiloxane and multilayer superposition. By superposing four layers of micropatterned constructive substrates, the multilayer piezoresistive pressure sensor achieves a broad pressure range of 312 kPa, a high sensitivity of 2.525 kPa−1, a low limit of detection (LOD) of <12 Pa, and a fast response time of 45 ms. Compared with the traditional flexible pressure sensor, the pressure range of this sensor can be increased by at least an order of magnitude. The flexible piezoresistive pressure sensor also shows high robustness: after testing for at least 1000 cycles, it shows no sign of fatigue. More importantly, these sensors can be potentially applied in various human motion detection scenarios, including tiny pulse monitoring, throat vibration detection, and large under-feet pressure sensing. The proposed fabrication strategy may guide the design of other kinds of multifunctional sensors to improve the detection performance.
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