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Journal of Zhejiang University SCIENCE A 2009 Vol.10 No.10 P.1421-1427

http://doi.org/10.1631/jzus.A0820327


Characterization of a-Si:H/SiN multilayer waveguide polarization using an optical pumping applicationLED


Author(s):  Mohd Saiful Dzulkefly ZAN, Isamu KATO, Mohammad Syuhaimi AB-RAHMAN, Seri Mastura MUSTAZA

Affiliation(s):  Department of Electrical, Electronic and System Engineering, Faculty of Engineering and Built Environment, Universiti Kebangsaan Malaysia, Bangi 43600, Malaysia; more

Corresponding email(s):   saiful@vlsi.eng.ukm.my

Key Words:  Waveguide, Multilayer, Optical pumping, Light-emitting diode (LED), Double tubed coaxial line microwave plasma chemical vapor deposition (DTCL-MPCVD)


Mohd Saiful Dzulkefly ZAN, Isamu KATO, Mohammad Syuhaimi AB-RAHMAN, Seri Mastura MUSTAZA. Characterization of a-Si:H/SiN multilayer waveguide polarization using an optical pumping applicationLED[J]. Journal of Zhejiang University Science A, 2009, 10(10): 1421-1427.

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author="Mohd Saiful Dzulkefly ZAN, Isamu KATO, Mohammad Syuhaimi AB-RAHMAN, Seri Mastura MUSTAZA",
journal="Journal of Zhejiang University Science A",
volume="10",
number="10",
pages="1421-1427",
year="2009",
publisher="Zhejiang University Press & Springer",
doi="10.1631/jzus.A0820327"
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%A Mohd Saiful Dzulkefly ZAN
%A Isamu KATO
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%A Seri Mastura MUSTAZA
%J Journal of Zhejiang University SCIENCE A
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%@ 1673-565X
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%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.A0820327

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T1 - Characterization of a-Si:H/SiN multilayer waveguide polarization using an optical pumping applicationLED
A1 - Mohd Saiful Dzulkefly ZAN
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A1 - Mohammad Syuhaimi AB-RAHMAN
A1 - Seri Mastura MUSTAZA
J0 - Journal of Zhejiang University Science A
VL - 10
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PB - Zhejiang University Press & Springer
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DOI - 10.1631/jzus.A0820327


Abstract: 
This paper describes the fabrication of a waveguide and the analysis of its polarization characteristics by applying light-emitting diode (LED) pumping lights to its surface. By using double tubed coaxial line (DTCL) microwave plasma chemical vapor deposition (MPCVD) equipment, an a-Si:H/SiN multilayer waveguide was fabricated whose thickness could be controlled at nanometer order. The main structural material of the waveguide sample consisted of a combination of layers of amorphous silicon hydrogen and silicon nitrate. Once the sample was ready, another major objective of the experiment was to analyze the polarization characteristics of the fabricated waveguide. The idea of the experiment was to analyze how the waveguide reacts when three types of LED (blue, yellow, and red) are radiated onto its surface. The results showed that the fabrication of the a-Si:H/SiN sample is successful. Most effective transmission results, which accord with the polarization characteristics analysis, were obtained.

Darkslateblue:Affiliate; Royal Blue:Author; Turquoise:Article

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